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ISO 14644-2:2015

Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

Pages: 22
Publication date: 2015-12-15
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ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.
Document identifier
ISO 14644-2:2015
Title
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
ISO Category
TC 209: Cleanrooms and associated controlled environments
Publication date
2015-12-15
Status
Effective
International Relationship
DIN EN ISO 14644-2 * BS EN ISO 14644-2:2015
Cross references
Latest version
ISO 14644-2:2015
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
Document identifier ISO 14644-2:2015
Publication date 2015-12-15
Classification 13.040.35. Cleanrooms and associated controlled environments
Status Effective
*
History of version
ISO 14644-2:2015 * ISO 14644-2:2015 Plus Redline * ISO 14644-2:2000 * ISO 14644-1 / 14644-2 Set * FED FED-STD-209E * FED FED-STD-209D * FED FED-STD-209
Keywords
Classification
13.040.35. Cleanrooms and associated controlled environments
Pages
22
Price Contact

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