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ISO 13084:2018

Surface chemical analysis - Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

Pages: 22
Publication date: 2018-11-01
Price: 103 vnd

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This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.
Document identifier
ISO 13084:2018
Title
Surface chemical analysis - Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
ISO Category
TC 201/SC 6: Secondary ion mass spectrometry
Publication date
2018-11-01
Status
Effective
International Relationship
BS ISO 13084:2018
Cross references
Latest version
ISO 13084:2018
Surface chemical analysis - Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
Document identifier ISO 13084:2018
Publication date 2018-11-01
Classification 71.040.40. Chemical analysis
Status Effective
*
History of version
ISO 13084:2018 * ISO 13084:2011
Keywords
Classification
71.040.40. Chemical analysis
Pages
22
Price 103 vnd

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