ISO 17973:2002 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
Document identifier
ISO 17973:2002
Title
Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
ISO Category
TC 201/SC 7: X-ray photoelectron spectroscopy
Publication date
2002-10-15
International Relationship
BS ISO 17973:2002 * BS ISO 17973:2002
History of version
ISO 17973:2016*ISO 17973:2002 * ISO 17973:2016 * ISO 17973:2002
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ISO 17973:2002
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