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ISO 17973:2016

Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis

Pages: 18
Publication date: 2016-09-01
Price: 68 vnd

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ISO 17973:2016 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
Document identifier
ISO 17973:2016
Title
Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
ISO Category
TC 201/SC 7: X-ray photoelectron spectroscopy
Publication date
2016-09-01
Status
Effective
International Relationship
BS ISO 17973:2016
Cross references
Latest version
ISO 17973:2016
Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
Document identifier ISO 17973:2016
Publication date 2016-09-01
Classification 71.040.40. Chemical analysis
Status Effective
*
History of version
ISO 17973:2016 * ISO 17973:2002
Keywords
Classification
71.040.40. Chemical analysis
Pages
18
Price 68 vnd

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