This Recommended Practice (RP) describes the equipment, aerosol properties, processes, and calculations for determining the efficiency of ULPA and super ULPA filters in the factory, using particle counters. The procedure may be applied to production applications. This RP provides guidelines for constructing a suitable test duct and sampling system. Also provided are test criteria for quantifying penetration in the range of 0.0010% to 0.00010%, using test aerosol particles in the size range of 0.1 to 0.2 µm.
Document identifier
IEST RP-CC007.3
Title
Testing ULPA Filters
IEST Category
Contamination Control, Recommended Practices
Publication date
2016-04-01
International Relationship
History of version
IEST RP-CC007.3 * IEST RP-CC007.2
| Price |
485 vnd |
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