This part of ISO 14644 covers the classification of air cleanliness in cleanrooms and associated controlled environments exclusively in terms of concentration of airborne particles. Onlyparticlepopulationshavingcumulativedistributionsbased on threshold (lower limit) sizes ranging from 0,1 μm to 5 μm are considered for classification purposes.This part of ISO 14644 does not provide for classification of particle populations that are outside of the specified particle size range, 0,1 μm to 5 μm. Concentrations of ultrafine particles (particles smaller than 0,1 μm) and macroparticles (particles larger than 5 μm) may be used to quantify these populations in terms of U descriptors and M descriptors, respectively.This part of ISO 14644 cannot be used to characterize the physical, chemical, radiological, or viable nature of airborne particles.
Document identifier
ISO 14644-1:1999 [ Withdrawn ]
Title
Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness
ISO Category
TC 209/WG 1: Airborne particulate cleanliness classes
Publication date
1999-05-01
International Relationship
BS EN ISO 14644-1:1999
History of version
ISO 14644-1:2015*ISO 14644-1:1999 [ Withdrawn ] * ISO 14644-1:2015 * ISO 14644-1:2015 Plus Redline * ISO 14644-1 / 14644-2 Set * ISO 14644-1:1999 * FED FED-STD-209E * BS 5295-1:1989 * FED FED-STD-209D * FED FED-STD-209
Price |
123 vnd |