This document describes backend-level test and data methods for the qualification of semiconductor technologies. It does not give pass or fail values or recommend specific test equipment, test structures or test algorithms. Wherever possible, it references applicable JEDEC such as JESD47 or other widely accepted standards for requirements documentation.
Document identifier
JEDEC JEP001-1A
Title
FOUNDRY PROCESS QUALIFICATION GUIDELINES - BACKEND OF LINE (Wafer Fabrication Manufacturing Sites)
JEDEC Category
JC-14.3: Silicon Devices Reliability Qualification and Monitoring
Publication date
2018-09-01
International Relationship
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67 vnd |
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