Current and future laser measurement services at 157, 193 and 248 nm will be reviewed. Laser power and energy measurements at 193 nm will be presented; electrical calibration issues will be reviewed. We report an overall calibration uncertainty of laser power and energy meters of less than 2%. Characterization measurements for ultraviolet materials also will be discussed.
Document identifier
SME MS00-236
Title
New Developments In Deep Ultraviolet Laser Metrology For Photolighography
SME Category
Manufacturing Systems
Publication date
2000-11-01
International Relationship
| Price |
18 vnd |
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