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ISO 16413:2013

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

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Publication date: 2013-02-15
Price: 162 vnd

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Document identifier
ISO 16413:2013
Title
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
ISO Category
TC 201: Surface chemical analysis
Publication date
2013-02-15
Status
Effective
International Relationship
BS ISO 16413:2013
Cross references
Latest version
History of version
Keywords
Classification
35.240.70. IT applications in science
71.040.40. Chemical analysis
Pages
Price 162 vnd

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