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IEC 62047-32 Ed. 1.0 b:2019

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

Pages: 37
Publication date: 2019-01-24
Price: 117 vnd

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IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
Document identifier
IEC 62047-32 Ed. 1.0 b:2019
Title
Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
IEC Category
SC 47F: Micro-electromechanical systems
Publication date
2019-01-24
Status
Effective
International Relationship
Cross references
Latest version
History of version
Keywords
Classification
31.080.99. Other semiconductor devices
Pages
37
Price 117 vnd

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