Loading data. Please wait

Search standard  
Advanced search

ISO 18516:2006

Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution

Pages:
Publication date: 2006-11-01
Price: 138 vnd

Add to cart
ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The grid method is suitable if the lateral resolution is expected to be less than 1 micrometre but more than 20 nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm. Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.
Document identifier
ISO 18516:2006
Title
Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution
ISO Category
TC 201/SC 5: Auger electron spectroscopy
Publication date
2006-11-01
Status
Ineffective
International Relationship
BS ISO 18516:2006 * BS ISO 18516:2006
Cross references
Latest version
ISO 18516:2019
Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
Document identifier ISO 18516:2019
Publication date 2019-02-01
Classification 71.040.40. Chemical analysis
Status Effective
*
History of version
ISO 18516:2019*ISO 18516:2006 * ISO 18516:2019 * ISO 18516:2006
Keywords
Classification
71.040.40. Chemical analysis
Pages
Price 138 vnd

POPULAR PUBLISHERS | ALL PUBLISHERS