ISO 14594:2003 gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth and analysis volume.ISO 14594:2003 is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained may only be indicative for other experimental conditions.
Document identifier
ISO 14594:2003
Title
Microbeam analysis - Electron probe microanalysis - Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
ISO Category
TC 202/SC 2: Electron probe microanalysis
Publication date
2003-08-01
International Relationship
BS ISO 14594:2003 * BS ISO 14594:2003
History of version
ISO 14594:2014*ISO 14594:2003 * ISO 14594:2014 * ISO 14594/Cor1:2009 * ISO 14594:2003
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