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ISO 11505:2012

Surface chemical analysis - General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry

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Publication date: 2012-12-15
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ISO 11505:2013 describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.It is limited to a description of general procedures of quantification of GD-OES and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.
Document identifier
ISO 11505:2012
Title
Surface chemical analysis - General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
ISO Category
TC 201/SC 8: Glow discharge spectroscopy
Publication date
2012-12-15
Status
Effective
International Relationship
BS ISO 11505:2012 * BS ISO 11505:2012 * DIN ISO 11505
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