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ISO 16700:2004

Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification

Pages: 16
Publication date: 2004-03-15
Price: 123 vnd

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ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.
Document identifier
ISO 16700:2004
Title
Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
ISO Category
TC 202/SC 4: Scanning electron microscopy (SEM)
Publication date
2004-03-15
Status
Ineffective
International Relationship
BS ISO 16700:2004 * BS ISO 16700:2004
Cross references
Latest version
ISO 16700:2016
Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
Document identifier ISO 16700:2016
Publication date 2016-08-01
Classification 37.020. Optical equipment
Status Effective
*
History of version
ISO 16700:2016*ISO 16700:2004 * ISO 16700:2016 * ISO 16700:2004
Keywords
Classification
37.020. Optical equipment
Pages
16
Price 123 vnd

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