ISO 27894:2009 defines terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges.
Document identifier
ISO 27894:2009
Title
Vacuum technology - Vacuum gauges - Specifications for hot cathode ionization gauges
ISO Category
TC 112: Vacuum technology
Publication date
2009-12-15
International Relationship
BS ISO 27894:2009 * BS ISO 27894:2009
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138 vnd |
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