Loading data. Please wait

Search standard  
Advanced search

ISO 13083:2015

Surface chemical analysis - Scanning probe microscopy - Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

Pages: 22
Publication date: 2015-08-15
Price: 103 vnd

Add to cart
ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.
Document identifier
ISO 13083:2015
Title
Surface chemical analysis - Scanning probe microscopy - Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
ISO Category
TC 201/SC 9: Scanning probe microscopy
Publication date
2015-08-15
Status
Effective
International Relationship
BS ISO 13083:2015
Cross references
Latest version
History of version
Keywords
Classification
71.040.40. Chemical analysis
Pages
22
Price 103 vnd

POPULAR PUBLISHERS | ALL PUBLISHERS