Technical Guide 1002 supplements the coverage of procedures for determining the concentration of ultrafine particles as provided by ISO 14644-1. Procedures presented in this Guide are suitable for classification (in accordance with ISO 14644-1)and monitoring (in accordance with ISO 14644-2) of cleanroom and clean zone environments that would typically qualify as ISO Class 4 or cleaner. This guide describes the apparatus and procedures necessary for determining the U descriptor and provides guidelines and an example format for reporting data.
Document identifier
IEST G-CC1002
Title
Determination of the Concentration of Airborne Ultrafine Particles
IEST Category
Contamination Control, IEST Technical Guides
Publication date
1999-12-01
International Relationship
Price |
165 vnd |