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ISO 11952:2014

Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems

Pages: 66
Publication date: 2014-05-15
Price: 209 vnd

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ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.
Document identifier
ISO 11952:2014
Title
Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems
ISO Category
TC 201/SC 9: Scanning probe microscopy
Publication date
2014-05-15
Status
Ineffective
International Relationship
Cross references
Latest version
ISO 11952:2019
Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems
Document identifier ISO 11952:2019
Publication date 2019-06-01
Classification 71.040.40. Chemical analysis
Status Effective
*
History of version
ISO 11952:2019*ISO 11952:2014 * ISO 11952:2019 * ISO 11952:2014
Keywords
Classification
71.040.40. Chemical analysis
Pages
66
Price 209 vnd

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